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Maverick Narkom
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Gesammelt von Ferdinand Avenarius
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Electroceramic-Based MEMS formatIsbn:Softcover - 9781441936042 Maverick NarkomThe concept of micromachining of silicon to form micron scale structures such as cantilevers, free standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and technology has resulted in the em gence of a new category of functional systems called MEMS (microelectomechanical systems). MEMS are miniature systems containing devices or arrays of devices that combine electronics with other components such
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